JPH02115560U - - Google Patents
Info
- Publication number
- JPH02115560U JPH02115560U JP2303489U JP2303489U JPH02115560U JP H02115560 U JPH02115560 U JP H02115560U JP 2303489 U JP2303489 U JP 2303489U JP 2303489 U JP2303489 U JP 2303489U JP H02115560 U JPH02115560 U JP H02115560U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- evaporation
- flange
- centrifugal
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000001023 centrifugal evaporation Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303489U JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303489U JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02115560U true JPH02115560U (en]) | 1990-09-17 |
| JPH069009Y2 JPH069009Y2 (ja) | 1994-03-09 |
Family
ID=31241685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2303489U Expired - Lifetime JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069009Y2 (en]) |
-
1989
- 1989-03-02 JP JP2303489U patent/JPH069009Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069009Y2 (ja) | 1994-03-09 |